Parent Directory| Name | Size | Last Modified |
|---|---|---|
 0001104659-25-095307-index-headers.html | 2025-10-01 07:06:29 | |
| 0001104659-25-095307-index.html | 2025-10-01 07:06:29 | |
| 0001104659-25-095307.txt | 2025-10-01 07:06:29 | |
 0001104659-25-095307-xbrl.zip | 145164 | 2025-10-01 07:06:29 |
| acls-20251001.xsd | 3011 | 2025-10-01 07:06:29 |
| acls-20251001_lab.xml | 34239 | 2025-10-01 07:06:29 |
| acls-20251001_pre.xml | 22356 | 2025-10-01 07:06:29 |
| FilingSummary.xml | 1637 | 2025-10-01 07:06:29 |
| MetaLinks.json | 39179 | 2025-10-01 07:06:29 |
| R1.htm | 38062 | 2025-10-01 07:06:29 |
| report.css | 2767 | 2025-10-01 07:06:29 |
| Show.js | 1084 | 2025-10-01 07:06:29 |
| tm2527661d1_8k.htm | 66378 | 2025-10-01 07:06:29 |
| tm2527661d1_8k_htm.xml | 3555 | 2025-10-01 07:06:29 |
| tm2527661d1_ex2-1.htm | 890158 | 2025-10-01 07:06:29 |
| tm2527661d1_ex99-1.htm | 38251 | 2025-10-01 07:06:29 |