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|---|---|---|
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| 0001104659-25-073971-index.html | 2025-08-05 08:43:27 | |
| 0001104659-25-073971.txt | 2025-08-05 08:43:27 | |
 0001104659-25-073971-xbrl.zip | 23721 | 2025-08-05 08:43:27 |
| acls-20250805.xsd | 3011 | 2025-08-05 08:43:27 |
| acls-20250805_lab.xml | 34239 | 2025-08-05 08:43:27 |
| acls-20250805_pre.xml | 22356 | 2025-08-05 08:43:27 |
| FilingSummary.xml | 1637 | 2025-08-05 08:43:27 |
| MetaLinks.json | 39239 | 2025-08-05 08:43:27 |
| R1.htm | 38074 | 2025-08-05 08:43:27 |
| report.css | 2767 | 2025-08-05 08:43:27 |
| Show.js | 1084 | 2025-08-05 08:43:27 |
| tm2522083d1_8k.htm | 26002 | 2025-08-05 08:43:27 |
| tm2522083d1_8k_htm.xml | 3567 | 2025-08-05 08:43:27 |
| tm2522083d1_ex99-1.htm | 229756 | 2025-08-05 08:43:27 |
 tm2522083d1_ex99-1img001.jpg | 6933 | 2025-08-05 08:43:27 |