Parent Directory| Name | Size | Last Modified |
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| 0001104659-25-044808-index.html | 2025-05-06 07:30:20 | |
| 0001104659-25-044808.txt | 2025-05-06 07:30:20 | |
 0001104659-25-044808-xbrl.zip | 21650 | 2025-05-06 07:30:20 |
| acls-20250506.xsd | 3011 | 2025-05-06 07:30:20 |
| acls-20250506_lab.xml | 34239 | 2025-05-06 07:30:20 |
| acls-20250506_pre.xml | 22356 | 2025-05-06 07:30:20 |
| FilingSummary.xml | 1637 | 2025-05-06 07:30:20 |
| Financial_Report.xlsx | 5708 | 2025-05-06 07:30:20 |
| MetaLinks.json | 39128 | 2025-05-06 07:30:20 |
| R1.htm | 38073 | 2025-05-06 07:30:20 |
| report.css | 2767 | 2025-05-06 07:30:20 |
| Show.js | 1085 | 2025-05-06 07:30:20 |
| tm2513922d1_8k.htm | 25276 | 2025-05-06 07:30:20 |
| tm2513922d1_8k_htm.xml | 3567 | 2025-05-06 07:30:20 |
| tm2513922d1_ex99-1.htm | 166959 | 2025-05-06 07:30:20 |
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