Parent Directory| Name | Size | Last Modified |
|---|---|---|
 0001104659-25-022780-index-headers.html | 2025-03-12 08:20:21 | |
| 0001104659-25-022780-index.html | 2025-03-12 08:20:21 | |
| 0001104659-25-022780.txt | 2025-03-12 08:20:21 | |
 0001104659-25-022780-xbrl.zip | 12889 | 2025-03-12 08:20:21 |
| acls-20250312.xsd | 3012 | 2025-03-12 08:20:21 |
| acls-20250312_lab.xml | 34240 | 2025-03-12 08:20:21 |
| acls-20250312_pre.xml | 22357 | 2025-03-12 08:20:21 |
| FilingSummary.xml | 1636 | 2025-03-12 08:20:21 |
| Financial_Report.xlsx | 5686 | 2025-03-12 08:20:21 |
| MetaLinks.json | 39124 | 2025-03-12 08:20:21 |
| R1.htm | 38090 | 2025-03-12 08:20:21 |
| report.css | 2767 | 2025-03-12 08:20:21 |
| Show.js | 1085 | 2025-03-12 08:20:21 |
| tm258848d1_8k.htm | 25980 | 2025-03-12 08:20:21 |
| tm258848d1_8k_htm.xml | 3567 | 2025-03-12 08:20:21 |
| tm258848d1_ex99-1.htm | 8751 | 2025-03-12 08:20:21 |
 tm258848d1_ex99-1img001.jpg | 2637 | 2025-03-12 08:20:21 |