Parent Directory| Name | Size | Last Modified |
|---|---|---|
 0001104659-25-010940-index-headers.html | 2025-02-10 16:10:05 | |
| 0001104659-25-010940-index.html | 2025-02-10 16:10:05 | |
| 0001104659-25-010940.txt | 2025-02-10 16:10:05 | |
 0001104659-25-010940-xbrl.zip | 19510 | 2025-02-10 16:10:05 |
| acls-20250210.xsd | 3012 | 2025-02-10 16:10:05 |
| acls-20250210_lab.xml | 34240 | 2025-02-10 16:10:05 |
| acls-20250210_pre.xml | 22357 | 2025-02-10 16:10:05 |
| FilingSummary.xml | 1636 | 2025-02-10 16:10:05 |
| Financial_Report.xlsx | 5685 | 2025-02-10 16:10:05 |
| MetaLinks.json | 39124 | 2025-02-10 16:10:05 |
| R1.htm | 38090 | 2025-02-10 16:10:05 |
| report.css | 2767 | 2025-02-10 16:10:05 |
| Show.js | 1085 | 2025-02-10 16:10:05 |
| tm255435d1_8k.htm | 25975 | 2025-02-10 16:10:05 |
| tm255435d1_8k_htm.xml | 3567 | 2025-02-10 16:10:05 |
| tm255435d1_ex99-1.htm | 141354 | 2025-02-10 16:10:05 |
 tm255435d1_ex99-1img001.jpg | 7315 | 2025-02-10 16:10:05 |
 tm255435d1_ex99-1img002.jpg | 8119 | 2025-02-10 16:10:05 |