Parent Directory| Name | Size | Last Modified |
|---|---|---|
 0001104659-25-002294-index-headers.html | 2025-01-10 08:01:14 | |
| 0001104659-25-002294-index.html | 2025-01-10 08:01:14 | |
| 0001104659-25-002294.txt | 2025-01-10 08:01:14 | |
 0001104659-25-002294-xbrl.zip | 10484 | 2025-01-10 08:01:14 |
| acls-20250110.xsd | 3012 | 2025-01-10 08:01:14 |
| acls-20250110_lab.xml | 34240 | 2025-01-10 08:01:14 |
| acls-20250110_pre.xml | 22357 | 2025-01-10 08:01:14 |
| FilingSummary.xml | 1634 | 2025-01-10 08:01:14 |
| Financial_Report.xlsx | 5679 | 2025-01-10 08:01:14 |
| MetaLinks.json | 39124 | 2025-01-10 08:01:14 |
| R1.htm | 38078 | 2025-01-10 08:01:14 |
| report.css | 2766 | 2025-01-10 08:01:14 |
| Show.js | 1084 | 2025-01-10 08:01:14 |
| tm252784d1_8k.htm | 23849 | 2025-01-10 08:01:14 |
| tm252784d1_8k_htm.xml | 3557 | 2025-01-10 08:01:14 |