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| 0001104659-24-078460.txt | 2024-07-09 08:22:08 | |
 0001104659-24-078460-xbrl.zip | 14252 | 2024-07-09 08:22:08 |
| acls-20240709.xsd | 3012 | 2024-07-09 08:22:08 |
| acls-20240709_lab.xml | 34240 | 2024-07-09 08:22:08 |
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| FilingSummary.xml | 1637 | 2024-07-09 08:22:08 |
| Financial_Report.xlsx | 5688 | 2024-07-09 08:22:08 |
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| R1.htm | 38090 | 2024-07-09 08:22:08 |
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| tm2419004d1_8k.htm | 26251 | 2024-07-09 08:22:08 |
| tm2419004d1_8k_htm.xml | 3567 | 2024-07-09 08:22:08 |
| tm2419004d1_ex99-1.htm | 15803 | 2024-07-09 08:22:08 |
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