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| 0001104659-24-059307-index.html | 2024-05-09 16:01:13 | |
| 0001104659-24-059307.txt | 2024-05-09 16:01:13 | |
 0001104659-24-059307-xbrl.zip | 15973 | 2024-05-09 16:01:13 |
| acls-20240509.xsd | 3012 | 2024-05-09 16:01:13 |
| acls-20240509_lab.xml | 34240 | 2024-05-09 16:01:13 |
| acls-20240509_pre.xml | 22357 | 2024-05-09 16:01:13 |
| FilingSummary.xml | 1640 | 2024-05-09 16:01:13 |
| Financial_Report.xlsx | 5708 | 2024-05-09 16:01:13 |
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| R1.htm | 39598 | 2024-05-09 16:01:13 |
| report.css | 2767 | 2024-05-09 16:01:13 |
| Show.js | 1084 | 2024-05-09 16:01:13 |
| tm2413500d1_8k.htm | 69017 | 2024-05-09 16:01:13 |
| tm2413500d1_8k_htm.xml | 3674 | 2024-05-09 16:01:13 |
| tm2413500d1_ex3-1.htm | 8337 | 2024-05-09 16:01:13 |