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|---|---|---|
 0001104659-24-040855-index-headers.html | 2024-03-29 08:01:11 | |
| 0001104659-24-040855-index.html | 2024-03-29 08:01:11 | |
| 0001104659-24-040855.txt | 2024-03-29 08:01:11 | |
 0001104659-24-040855-xbrl.zip | 909273 | 2024-03-29 08:01:11 |
| acls-20231231.xsd | 6547 | 2024-03-29 08:01:11 |
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 bc_ceorealized-4c.jpg | 42931 | 2024-03-29 08:01:11 |
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 pc_boardnom-4c.jpg | 43667 | 2024-03-29 08:01:11 |
 pc_tenure-4c.jpg | 36485 | 2024-03-29 08:01:11 |
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| R1.htm | 10849 | 2024-03-29 08:01:11 |
| R2.htm | 283498 | 2024-03-29 08:01:11 |
| report.css | 2767 | 2024-03-29 08:01:11 |
| Show.js | 1085 | 2024-03-29 08:01:11 |
 tb_auditcompetc-4c.jpg | 73732 | 2024-03-29 08:01:11 |
| tm242686-d4_def14a.htm | 1156304 | 2024-03-29 08:01:11 |
| tm242686-d4_def14a_htm.xml | 298327 | 2024-03-29 08:01:11 |