Parent Directory| Name | Size | Last Modified |
|---|---|---|
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| 0001104659-24-032133-index.html | 2024-03-08 09:01:39 | |
| 0001104659-24-032133.txt | 2024-03-08 09:01:39 | |
 0001104659-24-032133-xbrl.zip | 909345 | 2024-03-08 09:01:39 |
| acls-20231231.xsd | 6547 | 2024-03-08 09:01:39 |
| acls-20231231_def.xml | 6264 | 2024-03-08 09:01:39 |
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 bc_ceorealized-4c.jpg | 42931 | 2024-03-08 09:01:39 |
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| Financial_Report.xlsx | 12977 | 2024-03-08 09:01:39 |
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 lg_axcelis-4c.jpg | 12611 | 2024-03-08 09:01:39 |
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 pc_boardnom-4c.jpg | 43667 | 2024-03-08 09:01:39 |
 pc_tenure-4c.jpg | 36485 | 2024-03-08 09:01:39 |
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| R1.htm | 10851 | 2024-03-08 09:01:39 |
| R2.htm | 283515 | 2024-03-08 09:01:39 |
| report.css | 2767 | 2024-03-08 09:01:39 |
| Show.js | 1085 | 2024-03-08 09:01:39 |
 tb_auditcompetc-4c.jpg | 73732 | 2024-03-08 09:01:39 |
| tm242686d2_pre14a.htm | 1157722 | 2024-03-08 09:01:39 |
| tm242686d2_pre14a_htm.xml | 298365 | 2024-03-08 09:01:39 |