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| 0001104659-24-011628-index.html | 2024-02-07 16:26:29 | |
| 0001104659-24-011628.txt | 2024-02-07 16:26:29 | |
 0001104659-24-011628-xbrl.zip | 17697 | 2024-02-07 16:26:29 |
| acls-20240207.xsd | 3012 | 2024-02-07 16:26:29 |
| acls-20240207_lab.xml | 34240 | 2024-02-07 16:26:29 |
| acls-20240207_pre.xml | 22357 | 2024-02-07 16:26:29 |
| FilingSummary.xml | 1636 | 2024-02-07 16:26:29 |
| Financial_Report.xlsx | 5688 | 2024-02-07 16:26:29 |
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| R1.htm | 38092 | 2024-02-07 16:26:29 |
| report.css | 2767 | 2024-02-07 16:26:29 |
| Show.js | 1085 | 2024-02-07 16:26:29 |
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| tm245218d1_8k.htm | 26072 | 2024-02-07 16:26:29 |
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| tm245218d1_ex99-1.htm | 98132 | 2024-02-07 16:26:29 |