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| 0001104659-23-113387-index.html | 2023-11-01 16:10:08 | |
| 0001104659-23-113387.txt | 2023-11-01 16:10:08 | |
 0001104659-23-113387-xbrl.zip | 17509 | 2023-11-01 16:10:08 |
| acls-20231101.xsd | 3012 | 2023-11-01 16:10:08 |
| acls-20231101_lab.xml | 34240 | 2023-11-01 16:10:08 |
| acls-20231101_pre.xml | 22357 | 2023-11-01 16:10:08 |
| FilingSummary.xml | 1637 | 2023-11-01 16:10:08 |
| Financial_Report.xlsx | 5687 | 2023-11-01 16:10:08 |
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| R1.htm | 38090 | 2023-11-01 16:10:08 |
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| tm2329432d1_8k_htm.xml | 3215 | 2023-11-01 16:10:08 |
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