Parent Directory| Name | Size | Last Modified |
|---|---|---|
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| 0001104659-23-098017-index.html | 2023-09-05 08:18:34 | |
| 0001104659-23-098017.txt | 2023-09-05 08:18:34 | |
 0001104659-23-098017-xbrl.zip | 11423 | 2023-09-05 08:18:34 |
| acls-20230905.xsd | 3012 | 2023-09-05 08:18:34 |
| acls-20230905_lab.xml | 34240 | 2023-09-05 08:18:34 |
| acls-20230905_pre.xml | 22357 | 2023-09-05 08:18:34 |
| FilingSummary.xml | 1604 | 2023-09-05 08:18:34 |
| Financial_Report.xlsx | 5688 | 2023-09-05 08:18:34 |
| MetaLinks.json | 39128 | 2023-09-05 08:18:34 |
| R1.htm | 38084 | 2023-09-05 08:18:34 |
| report.css | 2766 | 2023-09-05 08:18:34 |
| Show.js | 1084 | 2023-09-05 08:18:34 |
| tm2324160d1_8k.htm | 26344 | 2023-09-05 08:18:34 |
| tm2324160d1_8k_htm.xml | 3209 | 2023-09-05 08:18:34 |