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| 0001104659-23-086813-index.html | 2023-08-02 16:20:58 | |
| 0001104659-23-086813.txt | 2023-08-02 16:20:58 | |
 0001104659-23-086813-xbrl.zip | 17511 | 2023-08-02 16:20:58 |
| acls-20230802.xsd | 3012 | 2023-08-02 16:20:58 |
| acls-20230802_lab.xml | 34240 | 2023-08-02 16:20:58 |
| acls-20230802_pre.xml | 22357 | 2023-08-02 16:20:58 |
| FilingSummary.xml | 1644 | 2023-08-02 16:20:58 |
| Financial_Report.xlsx | 5688 | 2023-08-02 16:20:58 |
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| R1.htm | 38090 | 2023-08-02 16:20:58 |
| report.css | 2767 | 2023-08-02 16:20:58 |
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| tm2322423d1_8k.htm | 25427 | 2023-08-02 16:20:58 |
| tm2322423d1_8k_htm.xml | 3215 | 2023-08-02 16:20:58 |
| tm2322423d1_ex99-1.htm | 99932 | 2023-08-02 16:20:58 |
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