Parent Directory| Name | Size | Last Modified |
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| 0001104659-23-059495-index.html | 2023-05-12 09:14:36 | |
| 0001104659-23-059495.txt | 2023-05-12 09:14:36 | |
 0001104659-23-059495-xbrl.zip | 24079 | 2023-05-12 09:14:36 |
| acls-20230511.xsd | 3030 | 2023-05-12 09:14:36 |
| acls-20230511_lab.xml | 34476 | 2023-05-12 09:14:36 |
| acls-20230511_pre.xml | 22593 | 2023-05-12 09:14:36 |
| FilingSummary.xml | 1646 | 2023-05-12 09:14:36 |
| Financial_Report.xlsx | 5685 | 2023-05-12 09:14:36 |
| MetaLinks.json | 39254 | 2023-05-12 09:14:36 |
| R1.htm | 38081 | 2023-05-12 09:14:36 |
| report.css | 2767 | 2023-05-12 09:14:36 |
| Show.js | 1084 | 2023-05-12 09:14:36 |
| tm2314798d1_8k.htm | 65898 | 2023-05-12 09:14:36 |
| tm2314798d1_8k_htm.xml | 3487 | 2023-05-12 09:14:36 |
| tm2314798d1_ex10-1.htm | 54481 | 2023-05-12 09:14:36 |