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| 0001104659-23-046426-index.html | 2023-04-18 07:41:53 | |
| 0001104659-23-046426.txt | 2023-04-18 07:41:53 | |
 0001104659-23-046426-xbrl.zip | 22784 | 2023-04-18 07:41:53 |
| acls-20230224.xsd | 3030 | 2023-04-18 07:41:53 |
| acls-20230224_lab.xml | 34476 | 2023-04-18 07:41:53 |
| acls-20230224_pre.xml | 22593 | 2023-04-18 07:41:53 |
| FilingSummary.xml | 1646 | 2023-04-18 07:41:53 |
| Financial_Report.xlsx | 5686 | 2023-04-18 07:41:53 |
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| R1.htm | 38083 | 2023-04-18 07:41:53 |
| report.css | 2767 | 2023-04-18 07:41:53 |
| Show.js | 1084 | 2023-04-18 07:41:53 |
| tm2313052d1_8k.htm | 25766 | 2023-04-18 07:41:53 |
| tm2313052d1_8k_htm.xml | 3487 | 2023-04-18 07:41:53 |
| tm2313052d1_ex10-1.htm | 66765 | 2023-04-18 07:41:53 |