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|---|---|---|
 0001104659-23-039635-index-headers.html | 2023-03-31 08:00:51 | |
| 0001104659-23-039635-index.html | 2023-03-31 08:00:51 | |
| 0001104659-23-039635.txt | 2023-03-31 08:00:51 | |
 0001104659-23-039635-xbrl.zip | 1958378 | 2023-03-31 08:00:51 |
| acls-20221231.xsd | 5176 | 2023-03-31 08:00:51 |
| acls-20221231_def.xml | 4886 | 2023-03-31 08:00:51 |
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 fc_committe-4c.jpg | 186986 | 2023-03-31 08:00:51 |
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| Financial_Report.xlsx | 11069 | 2023-03-31 08:00:51 |
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 lg_axcelis-4c.jpg | 24832 | 2023-03-31 08:00:51 |
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| R1.htm | 10849 | 2023-03-31 08:00:51 |
| R2.htm | 204304 | 2023-03-31 08:00:51 |
| report.css | 2767 | 2023-03-31 08:00:51 |
| Show.js | 1085 | 2023-03-31 08:00:51 |
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| tm231852d2_def14a_htm.xml | 187206 | 2023-03-31 08:00:51 |