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| 0001104659-22-113976.txt | 2022-11-02 16:24:32 | |
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| acls-20221102.xsd | 3030 | 2022-11-02 16:24:32 |
| acls-20221102_lab.xml | 34476 | 2022-11-02 16:24:32 |
| acls-20221102_pre.xml | 22593 | 2022-11-02 16:24:32 |
| FilingSummary.xml | 1648 | 2022-11-02 16:24:32 |
| Financial_Report.xlsx | 5692 | 2022-11-02 16:24:32 |
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| R1.htm | 38096 | 2022-11-02 16:24:32 |
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| tm2229273d1_ex99-1.htm | 101168 | 2022-11-02 16:24:32 |
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