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| 0001104659-22-085626-index.html | 2022-08-03 16:10:32 | |
| 0001104659-22-085626.txt | 2022-08-03 16:10:32 | |
 0001104659-22-085626-xbrl.zip | 17284 | 2022-08-03 16:10:32 |
| acls-20220803.xsd | 3030 | 2022-08-03 16:10:32 |
| acls-20220803_lab.xml | 34476 | 2022-08-03 16:10:32 |
| acls-20220803_pre.xml | 22593 | 2022-08-03 16:10:32 |
| FilingSummary.xml | 1646 | 2022-08-03 16:10:32 |
| Financial_Report.xlsx | 5691 | 2022-08-03 16:10:32 |
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| R1.htm | 38546 | 2022-08-03 16:10:32 |
| report.css | 2767 | 2022-08-03 16:10:32 |
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| tm2222388d1_8k.htm | 25783 | 2022-08-03 16:10:32 |
| tm2222388d1_8k_htm.xml | 3497 | 2022-08-03 16:10:32 |
| tm2222388d1_ex99-1.htm | 97645 | 2022-08-03 16:10:32 |
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