Parent Directory| Name | Size | Last Modified |
|---|---|---|
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| 0001104659-22-058781-index.html | 2022-05-11 16:06:01 | |
| 0001104659-22-058781.txt | 2022-05-11 16:06:01 | |
 0001104659-22-058781-xbrl.zip | 52551 | 2022-05-11 16:06:01 |
| acls-20220510.xsd | 3030 | 2022-05-11 16:06:01 |
| acls-20220510_lab.xml | 34476 | 2022-05-11 16:06:01 |
| acls-20220510_pre.xml | 22593 | 2022-05-11 16:06:01 |
| FilingSummary.xml | 1684 | 2022-05-11 16:06:01 |
| Financial_Report.xlsx | 5687 | 2022-05-11 16:06:01 |
| MetaLinks.json | 37940 | 2022-05-11 16:06:01 |
| R1.htm | 40232 | 2022-05-11 16:06:01 |
| report.css | 2767 | 2022-05-11 16:06:01 |
| Show.js | 1085 | 2022-05-11 16:06:01 |
| tm2213765d1_8k.htm | 52213 | 2022-05-11 16:06:01 |
| tm2213765d1_8k_htm.xml | 3600 | 2022-05-11 16:06:01 |
| tm2213765d1_ex3-1.htm | 109187 | 2022-05-11 16:06:01 |
| tm2213765d1_ex3-2.htm | 119915 | 2022-05-11 16:06:01 |