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| 0001104659-22-055823-index.html | 2022-05-04 16:10:07 | |
| 0001104659-22-055823.txt | 2022-05-04 16:10:07 | |
 0001104659-22-055823-xbrl.zip | 16758 | 2022-05-04 16:10:07 |
| acls-20220504.xsd | 3030 | 2022-05-04 16:10:07 |
| acls-20220504_lab.xml | 34476 | 2022-05-04 16:10:07 |
| acls-20220504_pre.xml | 22593 | 2022-05-04 16:10:07 |
| FilingSummary.xml | 1646 | 2022-05-04 16:10:07 |
| Financial_Report.xlsx | 5668 | 2022-05-04 16:10:07 |
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| R1.htm | 38699 | 2022-05-04 16:10:07 |
| report.css | 2767 | 2022-05-04 16:10:07 |
| Show.js | 1085 | 2022-05-04 16:10:07 |
| tm2213765d2_8k.htm | 25485 | 2022-05-04 16:10:07 |
| tm2213765d2_8k_htm.xml | 3497 | 2022-05-04 16:10:07 |
| tm2213765d2_ex99-1.htm | 77217 | 2022-05-04 16:10:07 |
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