Parent Directory| Name | Size | Last Modified |
|---|---|---|
 0001104659-21-133647-index-headers.html | 2021-11-03 16:14:18 | |
| 0001104659-21-133647-index.html | 2021-11-03 16:14:18 | |
| 0001104659-21-133647.txt | 2021-11-03 16:14:18 | |
 0001104659-21-133647-xbrl.zip | 18243 | 2021-11-03 16:14:18 |
| acls-20211103.xsd | 3186 | 2021-11-03 16:14:18 |
| acls-20211103_lab.xml | 34594 | 2021-11-03 16:14:18 |
| acls-20211103_pre.xml | 22711 | 2021-11-03 16:14:18 |
| FilingSummary.xml | 1639 | 2021-11-03 16:14:18 |
| Financial_Report.xlsx | 5667 | 2021-11-03 16:14:18 |
| MetaLinks.json | 38381 | 2021-11-03 16:14:18 |
| R1.htm | 38616 | 2021-11-03 16:14:18 |
| report.css | 2767 | 2021-11-03 16:14:18 |
| Show.js | 1085 | 2021-11-03 16:14:18 |
 tm2131675d1img_001.jpg | 2444 | 2021-11-03 16:14:18 |
| tm2131675d1_8k.htm | 25991 | 2021-11-03 16:14:18 |
| tm2131675d1_8k_htm.xml | 3501 | 2021-11-03 16:14:18 |
| tm2131675d1_ex99-1.htm | 172666 | 2021-11-03 16:14:18 |