Parent Directory| Name | Size | Last Modified |
|---|---|---|
 0001104659-21-100092-index-headers.html | 2021-08-04 16:20:42 | |
| 0001104659-21-100092-index.html | 2021-08-04 16:20:42 | |
| 0001104659-21-100092.txt | 2021-08-04 16:20:42 | |
 0001104659-21-100092-xbrl.zip | 17703 | 2021-08-04 16:20:42 |
| acls-20210804.xsd | 3185 | 2021-08-04 16:20:42 |
| acls-20210804_lab.xml | 34593 | 2021-08-04 16:20:42 |
| acls-20210804_pre.xml | 22710 | 2021-08-04 16:20:42 |
| FilingSummary.xml | 1639 | 2021-08-04 16:20:42 |
| Financial_Report.xlsx | 5669 | 2021-08-04 16:20:42 |
| MetaLinks.json | 38582 | 2021-08-04 16:20:42 |
| R1.htm | 38616 | 2021-08-04 16:20:42 |
| report.css | 2767 | 2021-08-04 16:20:42 |
| Show.js | 1085 | 2021-08-04 16:20:42 |
| tm2123731d1_8k.htm | 25410 | 2021-08-04 16:20:42 |
| tm2123731d1_8k_htm.xml | 3501 | 2021-08-04 16:20:42 |
| tm2123731d1_ex99-1.htm | 99131 | 2021-08-04 16:20:42 |
 tm2123731d1_ex99-1img001.jpg | 4426 | 2021-08-04 16:20:42 |