Parent Directory| Name | Size | Last Modified |
|---|---|---|
 0001104659-21-065918-index-headers.html | 2021-05-13 16:04:23 | |
| 0001104659-21-065918-index.html | 2021-05-13 16:04:23 | |
| 0001104659-21-065918.txt | 2021-05-13 16:04:23 | |
 0001104659-21-065918-xbrl.zip | 12248 | 2021-05-13 16:04:23 |
| acls-20210512.xsd | 3184 | 2021-05-13 16:04:23 |
| acls-20210512_lab.xml | 34592 | 2021-05-13 16:04:23 |
| acls-20210512_pre.xml | 22709 | 2021-05-13 16:04:23 |
| FilingSummary.xml | 1599 | 2021-05-13 16:04:23 |
| Financial_Report.xlsx | 5656 | 2021-05-13 16:04:23 |
| MetaLinks.json | 38582 | 2021-05-13 16:04:23 |
| R1.htm | 38599 | 2021-05-13 16:04:23 |
| report.css | 2766 | 2021-05-13 16:04:23 |
| Show.js | 1084 | 2021-05-13 16:04:23 |
| tm2116060d1_8k.htm | 51737 | 2021-05-13 16:04:23 |
| tm2116060d1_8k_htm.xml | 3487 | 2021-05-13 16:04:23 |