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| 0001104659-21-019823-index.html | 2021-02-10 16:18:48 | |
| 0001104659-21-019823.txt | 2021-02-10 16:18:48 | |
 0001104659-21-019823-xbrl.zip | 17185 | 2021-02-10 16:18:48 |
| acls-20210210.xsd | 3183 | 2021-02-10 16:18:48 |
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| FilingSummary.xml | 1635 | 2021-02-10 16:18:48 |
| Financial_Report.xlsx | 5442 | 2021-02-10 16:18:48 |
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| R1.htm | 38612 | 2021-02-10 16:18:48 |
| report.css | 2767 | 2021-02-10 16:18:48 |
| Show.js | 1085 | 2021-02-10 16:18:48 |
| tm215728d1_8k.htm | 24843 | 2021-02-10 16:18:48 |
| tm215728d1_8k_htm.xml | 3497 | 2021-02-10 16:18:48 |
| tm215728d1_ex99-1.htm | 79749 | 2021-02-10 16:18:48 |
 tm215728d1_ex99-1img001.jpg | 6763 | 2021-02-10 16:18:48 |
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