Parent Directory| Name | Size | Last Modified |
|---|---|---|
 0001104659-20-121817-index-headers.html | 2020-11-05 16:21:34 | |
| 0001104659-20-121817-index.html | 2020-11-05 16:21:34 | |
| 0001104659-20-121817.txt | 2020-11-05 16:21:34 | |
 0001104659-20-121817-xbrl.zip | 17248 | 2020-11-05 16:21:34 |
| acls-20201105.xsd | 3183 | 2020-11-05 16:21:34 |
| acls-20201105_lab.xml | 34591 | 2020-11-05 16:21:34 |
| acls-20201105_pre.xml | 22708 | 2020-11-05 16:21:34 |
| FilingSummary.xml | 1639 | 2020-11-05 16:21:34 |
| Financial_Report.xlsx | 5444 | 2020-11-05 16:21:34 |
| MetaLinks.json | 38582 | 2020-11-05 16:21:34 |
| R1.htm | 38612 | 2020-11-05 16:21:34 |
| report.css | 2767 | 2020-11-05 16:21:34 |
| Show.js | 1085 | 2020-11-05 16:21:34 |
| tm2034961-1_8k.htm | 26499 | 2020-11-05 16:21:34 |
| tm2034961-1_8k_htm.xml | 3696 | 2020-11-05 16:21:34 |
| tm2034961d1_ex99-1.htm | 95034 | 2020-11-05 16:21:34 |
 tm2034961d1_ex99-1img001.jpg | 2381 | 2020-11-05 16:21:34 |