Parent Directory| Name | Size | Last Modified |
|---|---|---|
 0001104659-16-118129-index-headers.html | 2016-05-05 12:02:15 | |
| 0001104659-16-118129-index.html | 2016-05-05 12:02:15 | |
| 0001104659-16-118129.txt | 2016-05-05 12:02:15 | |
 0001104659-16-118129-xbrl.zip | 57737 | 2016-05-05 12:02:15 |
| a16-6510_110q.htm | 652043 | 2016-05-05 12:02:15 |
| 662732 | 2016-05-05 12:02:15 | |
| a16-6510_1ex31d1.htm | 10628 | 2016-05-05 12:02:15 |
| a16-6510_1ex31d2.htm | 10650 | 2016-05-05 12:02:15 |
| a16-6510_1ex32d1.htm | 5046 | 2016-05-05 12:02:15 |
| a16-6510_1ex32d2.htm | 5067 | 2016-05-05 12:02:15 |
| acls-20160331.xml | 454509 | 2016-05-05 12:02:15 |
| acls-20160331.xsd | 20927 | 2016-05-05 12:02:15 |
| acls-20160331_cal.xml | 47497 | 2016-05-05 12:02:15 |
| acls-20160331_def.xml | 44805 | 2016-05-05 12:02:15 |
| acls-20160331_lab.xml | 251724 | 2016-05-05 12:02:15 |
| acls-20160331_pre.xml | 165193 | 2016-05-05 12:02:15 |
| FilingSummary.xml | 20828 | 2016-05-05 12:02:15 |
| Financial_Report.xlsx | 37034 | 2016-05-05 12:02:15 |
| R1.htm | 22219 | 2016-05-05 12:02:15 |
| R10.htm | 25580 | 2016-05-05 12:02:15 |
| R11.htm | 22297 | 2016-05-05 12:02:15 |
| R12.htm | 33508 | 2016-05-05 12:02:15 |
| R13.htm | 14892 | 2016-05-05 12:02:15 |
| R14.htm | 52636 | 2016-05-05 12:02:15 |
| R15.htm | 7084 | 2016-05-05 12:02:15 |
| R16.htm | 8144 | 2016-05-05 12:02:15 |
| R17.htm | 7513 | 2016-05-05 12:02:15 |
| R18.htm | 8469 | 2016-05-05 12:02:15 |
| R19.htm | 14073 | 2016-05-05 12:02:15 |
| R2.htm | 63934 | 2016-05-05 12:02:15 |
| R20.htm | 35614 | 2016-05-05 12:02:15 |
| R21.htm | 25452 | 2016-05-05 12:02:15 |
| R22.htm | 22929 | 2016-05-05 12:02:15 |
| R23.htm | 35254 | 2016-05-05 12:02:15 |
| R24.htm | 17693 | 2016-05-05 12:02:15 |
| R25.htm | 48476 | 2016-05-05 12:02:15 |
| R26.htm | 9904 | 2016-05-05 12:02:15 |
| R27.htm | 20464 | 2016-05-05 12:02:15 |
| R28.htm | 15247 | 2016-05-05 12:02:15 |
| R29.htm | 15348 | 2016-05-05 12:02:15 |
| R3.htm | 17373 | 2016-05-05 12:02:15 |
| R30.htm | 23164 | 2016-05-05 12:02:15 |
| R31.htm | 10060 | 2016-05-05 12:02:15 |
| R32.htm | 19425 | 2016-05-05 12:02:15 |
| R33.htm | 15476 | 2016-05-05 12:02:15 |
| R34.htm | 12605 | 2016-05-05 12:02:15 |
| R35.htm | 22761 | 2016-05-05 12:02:15 |
| R4.htm | 77433 | 2016-05-05 12:02:15 |
| R5.htm | 22919 | 2016-05-05 12:02:15 |
| R6.htm | 74678 | 2016-05-05 12:02:15 |
| R7.htm | 8697 | 2016-05-05 12:02:15 |
| R8.htm | 8597 | 2016-05-05 12:02:15 |
| R9.htm | 34946 | 2016-05-05 12:02:15 |
| report.css | 2767 | 2016-05-05 12:02:15 |
| Show.js | 1410 | 2016-05-05 12:02:15 |