Parent Directory| Name | Size | Last Modified |
|---|---|---|
 0001193125-21-145231-index-headers.html | 2021-04-30 16:29:04 | |
| 0001193125-21-145231-index.html | 2021-04-30 16:29:04 | |
| 0001193125-21-145231.txt | 2021-04-30 16:29:04 | |
 0001193125-21-145231-xbrl.zip | 138930 | 2021-04-30 16:29:04 |
| d165421d8k.htm | 44339 | 2021-04-30 16:29:04 |
| d165421d8k_htm.xml | 3269 | 2021-04-30 16:29:04 |
| d165421dex41.htm | 743842 | 2021-04-30 16:29:04 |
| entg-20210430.xsd | 3070 | 2021-04-30 16:29:04 |
| entg-20210430_lab.xml | 17374 | 2021-04-30 16:29:04 |
| entg-20210430_pre.xml | 10953 | 2021-04-30 16:29:04 |
| FilingSummary.xml | 1783 | 2021-04-30 16:29:04 |
| Financial_Report.xlsx | 5668 | 2021-04-30 16:29:04 |
 g165421g62y09.jpg | 35473 | 2021-04-30 16:29:04 |
| MetaLinks.json | 18272 | 2021-04-30 16:29:04 |
| R1.htm | 38612 | 2021-04-30 16:29:04 |
| report.css | 2767 | 2021-04-30 16:29:04 |
| Show.js | 1085 | 2021-04-30 16:29:04 |