Parent Directory| Name | Size | Last Modified |
|---|---|---|
 0001193125-20-128946-index-headers.html | 2020-04-30 17:02:41 | |
| 0001193125-20-128946-index.html | 2020-04-30 17:02:41 | |
| 0001193125-20-128946.txt | 2020-04-30 17:02:41 | |
 0001193125-20-128946-xbrl.zip | 121207 | 2020-04-30 17:02:41 |
| d33434d8k.htm | 42757 | 2020-04-30 17:02:41 |
| d33434d8k_htm.xml | 3269 | 2020-04-30 17:02:41 |
| d33434dex41.htm | 681764 | 2020-04-30 17:02:41 |
| entg-20200430.xsd | 3070 | 2020-04-30 17:02:41 |
| entg-20200430_lab.xml | 17374 | 2020-04-30 17:02:41 |
| entg-20200430_pre.xml | 10953 | 2020-04-30 17:02:41 |
| FilingSummary.xml | 1722 | 2020-04-30 17:02:41 |
| Financial_Report.xlsx | 5781 | 2020-04-30 17:02:41 |
| MetaLinks.json | 18210 | 2020-04-30 17:02:41 |
| R1.htm | 38608 | 2020-04-30 17:02:41 |
| report.css | 2767 | 2020-04-30 17:02:41 |
| Show.js | 1084 | 2020-04-30 17:02:41 |