Parent Directory| Name | Size | Last Modified |
|---|---|---|
 0001140361-25-018384-index-headers.html | 2025-05-12 16:15:35 | |
| 0001140361-25-018384-index.html | 2025-05-12 16:15:35 | |
| 0001140361-25-018384.txt | 2025-05-12 16:15:35 | |
 0001140361-25-018384-xbrl.zip | 20399 | 2025-05-12 16:15:35 |
| ef20048761_8k.htm | 46499 | 2025-05-12 16:15:35 |
| ef20048761_8k_htm.xml | 4052 | 2025-05-12 16:15:35 |
| ef20048761_ex99-1.htm | 12112 | 2025-05-12 16:15:35 |
| entg-20250511.xsd | 3982 | 2025-05-12 16:15:35 |
| entg-20250511_lab.xml | 21966 | 2025-05-12 16:15:35 |
| entg-20250511_pre.xml | 16044 | 2025-05-12 16:15:35 |
| FilingSummary.xml | 1762 | 2025-05-12 16:15:35 |
| Financial_Report.xlsx | 5716 | 2025-05-12 16:15:35 |
 image00001.jpg | 2826 | 2025-05-12 16:15:35 |
| MetaLinks.json | 20699 | 2025-05-12 16:15:35 |
| R1.htm | 38081 | 2025-05-12 16:15:35 |
| report.css | 2767 | 2025-05-12 16:15:35 |
| Show.js | 1085 | 2025-05-12 16:15:35 |