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| 0001140361-24-032558-index.html | 2024-07-08 06:15:36 | |
| 0001140361-24-032558.txt | 2024-07-08 06:15:36 | |
 0001140361-24-032558-xbrl.zip | 12360 | 2024-07-08 06:15:36 |
| ef20032109_8k.htm | 25925 | 2024-07-08 06:15:36 |
| ef20032109_8k_htm.xml | 4052 | 2024-07-08 06:15:36 |
| entg-20240707.xsd | 3865 | 2024-07-08 06:15:36 |
| entg-20240707_lab.xml | 21966 | 2024-07-08 06:15:36 |
| entg-20240707_pre.xml | 16044 | 2024-07-08 06:15:36 |
| FilingSummary.xml | 1762 | 2024-07-08 06:15:36 |
| Financial_Report.xlsx | 5699 | 2024-07-08 06:15:36 |
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| MetaLinks.json | 20621 | 2024-07-08 06:15:36 |
| R1.htm | 38100 | 2024-07-08 06:15:36 |
| report.css | 2767 | 2024-07-08 06:15:36 |
| Show.js | 1084 | 2024-07-08 06:15:36 |