Parent Directory| Name | Size | Last Modified |
|---|---|---|
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| 0001140361-24-010926-index.html | 2024-03-04 07:23:16 | |
| 0001140361-24-010926.txt | 2024-03-04 07:23:16 | |
 0001140361-24-010926-xbrl.zip | 281236 | 2024-03-04 07:23:16 |
| ef20022925_8k.htm | 36435 | 2024-03-04 07:23:16 |
| ef20022925_8k_htm.xml | 4052 | 2024-03-04 07:23:16 |
| ef20022925_ex99-1.htm | 60759 | 2024-03-04 07:23:16 |
| entg-20240304.xsd | 3865 | 2024-03-04 07:23:16 |
| entg-20240304_lab.xml | 21966 | 2024-03-04 07:23:16 |
| entg-20240304_pre.xml | 16044 | 2024-03-04 07:23:16 |
| FilingSummary.xml | 1764 | 2024-03-04 07:23:16 |
| Financial_Report.xlsx | 5699 | 2024-03-04 07:23:16 |
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| MetaLinks.json | 20593 | 2024-03-04 07:23:16 |
| R1.htm | 38102 | 2024-03-04 07:23:16 |
| report.css | 2767 | 2024-03-04 07:23:16 |
| Show.js | 1085 | 2024-03-04 07:23:16 |