Parent Directory| Name | Size | Last Modified |
|---|---|---|
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| 0001140361-23-046139-index.html | 2023-10-02 08:53:59 | |
| 0001140361-23-046139.txt | 2023-10-02 08:53:59 | |
 0001140361-23-046139-xbrl.zip | 16255 | 2023-10-02 08:53:59 |
| ef20011575_8k.htm | 30110 | 2023-10-02 08:53:59 |
| ef20011575_8k_htm.xml | 4052 | 2023-10-02 08:53:59 |
| ef20011575_ex99-1.htm | 11655 | 2023-10-02 08:53:59 |
| entg-20231002.xsd | 3865 | 2023-10-02 08:53:59 |
| entg-20231002_lab.xml | 22546 | 2023-10-02 08:53:59 |
| entg-20231002_pre.xml | 16044 | 2023-10-02 08:53:59 |
| FilingSummary.xml | 1762 | 2023-10-02 08:53:59 |
| Financial_Report.xlsx | 5699 | 2023-10-02 08:53:59 |
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| R1.htm | 38100 | 2023-10-02 08:53:59 |
| report.css | 2767 | 2023-10-02 08:53:59 |
| Show.js | 1085 | 2023-10-02 08:53:59 |