Parent Directory| Name | Size | Last Modified |
|---|---|---|
 0001140361-23-043716-index-headers.html | 2023-09-12 18:28:25 | |
| 0001140361-23-043716-index.html | 2023-09-12 18:28:25 | |
| 0001140361-23-043716.txt | 2023-09-12 18:28:25 | |
 0001140361-23-043716-xbrl.zip | 284802 | 2023-09-12 18:28:25 |
| ef20010543_8k.htm | 33694 | 2023-09-12 18:28:25 |
| ef20010543_8k_htm.xml | 4052 | 2023-09-12 18:28:25 |
| ef20010543_ex10-01.htm | 1513940 | 2023-09-12 18:28:25 |
| entg-20230911.xsd | 3865 | 2023-09-12 18:28:25 |
| entg-20230911_lab.xml | 22546 | 2023-09-12 18:28:25 |
| entg-20230911_pre.xml | 16044 | 2023-09-12 18:28:25 |
| FilingSummary.xml | 1765 | 2023-09-12 18:28:25 |
| Financial_Report.xlsx | 5696 | 2023-09-12 18:28:25 |
 image2.jpg | 51077 | 2023-09-12 18:28:25 |
| MetaLinks.json | 20593 | 2023-09-12 18:28:25 |
| R1.htm | 38099 | 2023-09-12 18:28:25 |
| report.css | 2767 | 2023-09-12 18:28:25 |
| Show.js | 1085 | 2023-09-12 18:28:25 |