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| 0001140361-23-028232-index.html | 2023-06-05 07:51:49 | |
| 0001140361-23-028232.txt | 2023-06-05 07:51:49 | |
 0001140361-23-028232-xbrl.zip | 17949 | 2023-06-05 07:51:49 |
| brhc20053958_8k.htm | 32863 | 2023-06-05 07:51:49 |
| brhc20053958_8k_htm.xml | 4052 | 2023-06-05 07:51:49 |
| brhc20053958_ex99-1.htm | 14140 | 2023-06-05 07:51:49 |
| entg-20230605.xsd | 3865 | 2023-06-05 07:51:49 |
| entg-20230605_lab.xml | 22546 | 2023-06-05 07:51:49 |
| entg-20230605_pre.xml | 16044 | 2023-06-05 07:51:49 |
| FilingSummary.xml | 1776 | 2023-06-05 07:51:49 |
| Financial_Report.xlsx | 5700 | 2023-06-05 07:51:49 |
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| R1.htm | 38100 | 2023-06-05 07:51:49 |
| report.css | 2767 | 2023-06-05 07:51:49 |
| Show.js | 1085 | 2023-06-05 07:51:49 |