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|---|---|---|
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| 0001140361-23-023773-index.html | 2023-05-10 06:01:16 | |
| 0001140361-23-023773.txt | 2023-05-10 06:01:16 | |
 0001140361-23-023773-xbrl.zip | 55102 | 2023-05-10 06:01:16 |
 1-entg-logo-stacked-2color.jpg | 61950 | 2023-05-10 06:01:16 |
| brhc20052674_8k.htm | 32114 | 2023-05-10 06:01:16 |
| brhc20052674_8k_htm.xml | 4052 | 2023-05-10 06:01:16 |
| brhc20052674_ex99-1.htm | 19829 | 2023-05-10 06:01:16 |
| entg-20230510.xsd | 3865 | 2023-05-10 06:01:16 |
| entg-20230510_lab.xml | 22546 | 2023-05-10 06:01:16 |
| entg-20230510_pre.xml | 16044 | 2023-05-10 06:01:16 |
| FilingSummary.xml | 1792 | 2023-05-10 06:01:16 |
| Financial_Report.xlsx | 5695 | 2023-05-10 06:01:16 |
 image00001.jpg | 2394 | 2023-05-10 06:01:16 |
| MetaLinks.json | 20541 | 2023-05-10 06:01:16 |
| R1.htm | 38097 | 2023-05-10 06:01:16 |
| report.css | 2767 | 2023-05-10 06:01:16 |
| Show.js | 1085 | 2023-05-10 06:01:16 |