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| 0001140361-23-017816.txt | 2023-04-11 17:10:39 | |
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| brhc20051289_8k.htm | 39305 | 2023-04-11 17:10:39 |
| brhc20051289_8k_htm.xml | 4052 | 2023-04-11 17:10:39 |
| brhc20051289_ex99-1.htm | 8624 | 2023-04-11 17:10:39 |
| entg-20230411.xsd | 3865 | 2023-04-11 17:10:39 |
| entg-20230411_lab.xml | 22546 | 2023-04-11 17:10:39 |
| entg-20230411_pre.xml | 16044 | 2023-04-11 17:10:39 |
| FilingSummary.xml | 1776 | 2023-04-11 17:10:39 |
| Financial_Report.xlsx | 5695 | 2023-04-11 17:10:39 |
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| report.css | 2767 | 2023-04-11 17:10:39 |
| Show.js | 1085 | 2023-04-11 17:10:39 |