Parent Directory| Name | Size | Last Modified |
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| 0001140361-23-011406-index.html | 2023-03-13 16:02:34 | |
| 0001140361-23-011406.txt | 2023-03-13 16:02:34 | |
 0001140361-23-011406-xbrl.zip | 326733 | 2023-03-13 16:02:34 |
| brhc10049582_8k.htm | 33971 | 2023-03-13 16:02:34 |
| brhc10049582_8k_htm.xml | 4052 | 2023-03-13 16:02:34 |
| brhc10049582_ex10-01.htm | 1549696 | 2023-03-13 16:02:34 |
| entg-20230310.xsd | 3865 | 2023-03-13 16:02:34 |
| entg-20230310_lab.xml | 22546 | 2023-03-13 16:02:34 |
| entg-20230310_pre.xml | 16044 | 2023-03-13 16:02:34 |
| FilingSummary.xml | 1774 | 2023-03-13 16:02:34 |
| Financial_Report.xlsx | 5696 | 2023-03-13 16:02:34 |
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| MetaLinks.json | 20541 | 2023-03-13 16:02:34 |
| R1.htm | 38099 | 2023-03-13 16:02:34 |
| report.css | 2767 | 2023-03-13 16:02:34 |
| Show.js | 1085 | 2023-03-13 16:02:34 |