Parent Directory| Name | Size | Last Modified |
|---|---|---|
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| 0001140361-23-009419-index.html | 2023-03-01 16:18:37 | |
| 0001140361-23-009419.txt | 2023-03-01 16:18:37 | |
 0001140361-23-009419-xbrl.zip | 49884 | 2023-03-01 16:18:37 |
| brhc10049044_8k.htm | 29988 | 2023-03-01 16:18:37 |
| brhc10049044_8k_htm.xml | 4052 | 2023-03-01 16:18:37 |
| entg-20230301.xsd | 3865 | 2023-03-01 16:18:37 |
| entg-20230301_lab.xml | 22546 | 2023-03-01 16:18:37 |
| entg-20230301_pre.xml | 16044 | 2023-03-01 16:18:37 |
| FilingSummary.xml | 1949 | 2023-03-01 16:18:37 |
| Financial_Report.xlsx | 5698 | 2023-03-01 16:18:37 |
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| MetaLinks.json | 20569 | 2023-03-01 16:18:37 |
| R1.htm | 38100 | 2023-03-01 16:18:37 |
| report.css | 2767 | 2023-03-01 16:18:37 |
| Show.js | 1084 | 2023-03-01 16:18:37 |