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| 0001140361-23-006145-index.html | 2023-02-13 06:02:23 | |
| 0001140361-23-006145.txt | 2023-02-13 06:02:23 | |
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| brhc10048138_8k.htm | 23803 | 2023-02-13 06:02:23 |
| brhc10048138_8k_htm.xml | 4050 | 2023-02-13 06:02:23 |
| entg-20230210.xsd | 3865 | 2023-02-13 06:02:23 |
| entg-20230210_lab.xml | 22546 | 2023-02-13 06:02:23 |
| entg-20230210_pre.xml | 16044 | 2023-02-13 06:02:23 |
| FilingSummary.xml | 2009 | 2023-02-13 06:02:23 |
| Financial_Report.xlsx | 5698 | 2023-02-13 06:02:23 |
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| Show.js | 1084 | 2023-02-13 06:02:23 |