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| 0001140361-22-036742.txt | 2022-10-11 08:11:24 | |
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| brhc10042805_8k.htm | 33774 | 2022-10-11 08:11:24 |
| brhc10042805_8k_htm.xml | 4052 | 2022-10-11 08:11:24 |
| brhc10042805_ex99-1.htm | 14792 | 2022-10-11 08:11:24 |
| entg-20221010.xsd | 3866 | 2022-10-11 08:11:24 |
| entg-20221010_lab.xml | 22547 | 2022-10-11 08:11:24 |
| entg-20221010_pre.xml | 16045 | 2022-10-11 08:11:24 |
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| Financial_Report.xlsx | 5695 | 2022-10-11 08:11:24 |
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| report.css | 2767 | 2022-10-11 08:11:24 |
| Show.js | 1085 | 2022-10-11 08:11:24 |