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| 0001140361-22-033627-index.html | 2022-09-16 16:45:43 | |
| 0001140361-22-033627.txt | 2022-09-16 16:45:43 | |
 0001140361-22-033627-xbrl.zip | 101840 | 2022-09-16 16:45:43 |
| brhc10041818_8ka.htm | 32008 | 2022-09-16 16:45:43 |
| brhc10041818_8ka_htm.xml | 4212 | 2022-09-16 16:45:43 |
| brhc10041818_ex99-1.htm | 1380901 | 2022-09-16 16:45:43 |
| entg-20220706.xsd | 3865 | 2022-09-16 16:45:43 |
| entg-20220706_lab.xml | 23244 | 2022-09-16 16:45:43 |
| entg-20220706_pre.xml | 16532 | 2022-09-16 16:45:43 |
| FilingSummary.xml | 1780 | 2022-09-16 16:45:43 |
| Financial_Report.xlsx | 5722 | 2022-09-16 16:45:43 |
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| R1.htm | 39607 | 2022-09-16 16:45:43 |
| report.css | 2767 | 2022-09-16 16:45:43 |
| Show.js | 1085 | 2022-09-16 16:45:43 |