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| 0001140361-22-025275.txt | 2022-07-06 17:21:21 | |
 0001140361-22-025275-xbrl.zip | 596586 | 2022-07-06 17:21:21 |
| entg-20220706.xsd | 3923 | 2022-07-06 17:21:21 |
| entg-20220706_lab.xml | 22544 | 2022-07-06 17:21:21 |
| entg-20220706_pre.xml | 16042 | 2022-07-06 17:21:21 |
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| Financial_Report.xlsx | 5696 | 2022-07-06 17:21:21 |
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| ny20004647x3_ex4-10.htm | 1506334 | 2022-07-06 17:21:21 |
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