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| 0001140361-22-024601.txt | 2022-06-30 16:06:13 | |
 0001140361-22-024601-xbrl.zip | 153854 | 2022-06-30 16:06:13 |
| entg-20220630.xsd | 3923 | 2022-06-30 16:06:13 |
| entg-20220630_lab.xml | 22544 | 2022-06-30 16:06:13 |
| entg-20220630_pre.xml | 16042 | 2022-06-30 16:06:13 |
| FilingSummary.xml | 1721 | 2022-06-30 16:06:13 |
| Financial_Report.xlsx | 5700 | 2022-06-30 16:06:13 |
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| ny20004647x1_8k.htm | 48531 | 2022-06-30 16:06:13 |
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| R1.htm | 38558 | 2022-06-30 16:06:13 |
| report.css | 2767 | 2022-06-30 16:06:13 |
| Show.js | 1084 | 2022-06-30 16:06:13 |