Parent Directory| Name | Size | Last Modified |
|---|---|---|
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| 0001140361-22-023343-index.html | 2022-06-17 06:02:17 | |
| 0001140361-22-023343.txt | 2022-06-17 06:02:17 | |
 0001140361-22-023343-xbrl.zip | 59647 | 2022-06-17 06:02:17 |
| entg-20220616.xsd | 3923 | 2022-06-17 06:02:17 |
| entg-20220616_lab.xml | 22544 | 2022-06-17 06:02:17 |
| entg-20220616_pre.xml | 16042 | 2022-06-17 06:02:17 |
| FilingSummary.xml | 1783 | 2022-06-17 06:02:17 |
| Financial_Report.xlsx | 5677 | 2022-06-17 06:02:17 |
| MetaLinks.json | 20022 | 2022-06-17 06:02:17 |
 ny20003790x1_logo.jpg | 64967 | 2022-06-17 06:02:17 |
| ny20003790x3_8k.htm | 46655 | 2022-06-17 06:02:17 |
| ny20003790x3_8k_htm.xml | 4051 | 2022-06-17 06:02:17 |
| ny20003790x3_ex99-1.htm | 19455 | 2022-06-17 06:02:17 |
| R1.htm | 38713 | 2022-06-17 06:02:17 |
| report.css | 2767 | 2022-06-17 06:02:17 |
| Show.js | 1085 | 2022-06-17 06:02:17 |