Parent Directory| Name | Size | Last Modified |
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| 0001140361-22-023175-index.html | 2022-06-16 07:46:02 | |
| 0001140361-22-023175.txt | 2022-06-16 07:46:02 | |
 0001140361-22-023175-xbrl.zip | 121320 | 2022-06-16 07:46:02 |
| entg-20220616.xsd | 3923 | 2022-06-16 07:46:02 |
| entg-20220616_lab.xml | 22544 | 2022-06-16 07:46:02 |
| entg-20220616_pre.xml | 16042 | 2022-06-16 07:46:02 |
| FilingSummary.xml | 1867 | 2022-06-16 07:46:02 |
| Financial_Report.xlsx | 5676 | 2022-06-16 07:46:02 |
| MetaLinks.json | 20022 | 2022-06-16 07:46:02 |
| ny20003790x2_8k.htm | 46609 | 2022-06-16 07:46:02 |
| ny20003790x2_8k_htm.xml | 4049 | 2022-06-16 07:46:02 |
| ny20003790x2_ex99-1.htm | 251700 | 2022-06-16 07:46:02 |
| ny20003790x2_ex99-2.htm | 1356124 | 2022-06-16 07:46:02 |
| ny20003790x2_ex99-3.htm | 19163 | 2022-06-16 07:46:02 |
 ny20003790x2_logo01.jpg | 66455 | 2022-06-16 07:46:02 |
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| R1.htm | 38712 | 2022-06-16 07:46:02 |
| report.css | 2767 | 2022-06-16 07:46:02 |
| Show.js | 1085 | 2022-06-16 07:46:02 |