Parent Directory| Name | Size | Last Modified |
|---|---|---|
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| 0001140361-22-014648-index.html | 2022-04-14 19:53:34 | |
| 0001140361-22-014648.txt | 2022-04-14 19:53:34 | |
 0001140361-22-014648-xbrl.zip | 170434 | 2022-04-14 19:53:34 |
| entg-20220414.xsd | 3923 | 2022-04-14 19:53:34 |
| entg-20220414_lab.xml | 22544 | 2022-04-14 19:53:34 |
| entg-20220414_pre.xml | 16042 | 2022-04-14 19:53:34 |
| FilingSummary.xml | 1721 | 2022-04-14 19:53:34 |
| Financial_Report.xlsx | 5676 | 2022-04-14 19:53:34 |
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| ny20003659x3_8k.htm | 47080 | 2022-04-14 19:53:34 |
| ny20003659x3_8k_htm.xml | 4049 | 2022-04-14 19:53:34 |
| ny20003659x3_ex4-1.htm | 1300915 | 2022-04-14 19:53:34 |
| R1.htm | 38711 | 2022-04-14 19:53:34 |
| report.css | 2767 | 2022-04-14 19:53:34 |
| Show.js | 1084 | 2022-04-14 19:53:34 |