Parent Directory| Name | Size | Last Modified |
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| 0001140361-22-013228-index.html | 2022-04-05 18:57:50 | |
| 0001140361-22-013228.txt | 2022-04-05 18:57:50 | |
 0001140361-22-013228-xbrl.zip | 58931 | 2022-04-05 18:57:50 |
| entg-20220405.xsd | 3923 | 2022-04-05 18:57:50 |
| entg-20220405_lab.xml | 22544 | 2022-04-05 18:57:50 |
| entg-20220405_pre.xml | 16042 | 2022-04-05 18:57:50 |
| FilingSummary.xml | 1783 | 2022-04-05 18:57:50 |
| Financial_Report.xlsx | 5679 | 2022-04-05 18:57:50 |
| MetaLinks.json | 20022 | 2022-04-05 18:57:50 |
| ny20003000x4_8k.htm | 39684 | 2022-04-05 18:57:50 |
| ny20003000x4_8k_htm.xml | 4051 | 2022-04-05 18:57:50 |
| ny20003000x4_ex99-1.htm | 18944 | 2022-04-05 18:57:50 |
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| R1.htm | 38714 | 2022-04-05 18:57:50 |
| report.css | 2767 | 2022-04-05 18:57:50 |
| Show.js | 1085 | 2022-04-05 18:57:50 |