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| 0001140361-22-012788-index.html | 2022-04-04 08:09:11 | |
| 0001140361-22-012788.txt | 2022-04-04 08:09:11 | |
 0001140361-22-012788-xbrl.zip | 107383 | 2022-04-04 08:09:11 |
| entg-20220404.xsd | 3923 | 2022-04-04 08:09:11 |
| entg-20220404_lab.xml | 22544 | 2022-04-04 08:09:11 |
| entg-20220404_pre.xml | 16042 | 2022-04-04 08:09:11 |
| FilingSummary.xml | 1868 | 2022-04-04 08:09:11 |
| Financial_Report.xlsx | 5676 | 2022-04-04 08:09:11 |
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| ny20003000x2_8k.htm | 46508 | 2022-04-04 08:09:11 |
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| ny20003000x2_8k_htm.xml | 4049 | 2022-04-04 08:09:11 |
| ny20003000x2_ex99-1.htm | 175967 | 2022-04-04 08:09:11 |
| ny20003000x2_ex99-2.htm | 853842 | 2022-04-04 08:09:11 |
| ny20003000x2_ex99-3.htm | 19691 | 2022-04-04 08:09:11 |
| R1.htm | 38712 | 2022-04-04 08:09:11 |
| report.css | 2767 | 2022-04-04 08:09:11 |
| Show.js | 1085 | 2022-04-04 08:09:11 |