Parent Directory| Name | Size | Last Modified |
|---|---|---|
 0001140361-22-003191-index-headers.html | 2022-01-31 08:50:51 | |
| 0001140361-22-003191-index.html | 2022-01-31 08:50:51 | |
| 0001140361-22-003191.txt | 2022-01-31 08:50:51 | |
 0001140361-22-003191-xbrl.zip | 75931 | 2022-01-31 08:50:51 |
| entg-20220128.xsd | 3923 | 2022-01-31 08:50:51 |
| entg-20220128_lab.xml | 22544 | 2022-01-31 08:50:51 |
| entg-20220128_pre.xml | 16042 | 2022-01-31 08:50:51 |
| FilingSummary.xml | 1752 | 2022-01-31 08:50:51 |
| Financial_Report.xlsx | 5676 | 2022-01-31 08:50:51 |
| MetaLinks.json | 20055 | 2022-01-31 08:50:51 |
| ny20001665x23_8k.htm | 38145 | 2022-01-31 08:50:51 |
 ny20001665x23_8kimg01.jpg | 79117 | 2022-01-31 08:50:51 |
| ny20001665x23_8k_htm.xml | 4049 | 2022-01-31 08:50:51 |
| R1.htm | 38581 | 2022-01-31 08:50:51 |
| report.css | 2767 | 2022-01-31 08:50:51 |
| Show.js | 1084 | 2022-01-31 08:50:51 |